JPH0722034Y2 - 荷電粒子ビーム発生装置 - Google Patents
荷電粒子ビーム発生装置Info
- Publication number
- JPH0722034Y2 JPH0722034Y2 JP12117689U JP12117689U JPH0722034Y2 JP H0722034 Y2 JPH0722034 Y2 JP H0722034Y2 JP 12117689 U JP12117689 U JP 12117689U JP 12117689 U JP12117689 U JP 12117689U JP H0722034 Y2 JPH0722034 Y2 JP H0722034Y2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- charged particle
- electrode
- particle beam
- control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002245 particle Substances 0.000 title claims description 31
- 238000010884 ion-beam technique Methods 0.000 description 29
- 238000000605 extraction Methods 0.000 description 14
- 230000001133 acceleration Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000001629 suppression Effects 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 230000008033 biological extinction Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12117689U JPH0722034Y2 (ja) | 1989-10-16 | 1989-10-16 | 荷電粒子ビーム発生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12117689U JPH0722034Y2 (ja) | 1989-10-16 | 1989-10-16 | 荷電粒子ビーム発生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0360741U JPH0360741U (en]) | 1991-06-14 |
| JPH0722034Y2 true JPH0722034Y2 (ja) | 1995-05-17 |
Family
ID=31669214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12117689U Expired - Lifetime JPH0722034Y2 (ja) | 1989-10-16 | 1989-10-16 | 荷電粒子ビーム発生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0722034Y2 (en]) |
-
1989
- 1989-10-16 JP JP12117689U patent/JPH0722034Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0360741U (en]) | 1991-06-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |